CFSensor offers cutting-edge vacuum pressure sensor that help monitor and control vacuum systems in various industries, including semiconductors, aerospace, and pharmaceuticals. With its advanced technology and expertise, CFSensor ensures that its customers get accurate and reliable data measurements to maintain their vacuum systems’ performance and prolong the lifespan of their equipment. Let’s take a closer look at what makes CFSensor’s vacuum sensor stand out.

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XGZP6849A Pressure Sensor

  • Wide Ranges: -100kPa…0kPa…1500kPa
  • Optional 5V or 3.3V Power Supply
  • Gauge (Positive&Vacuum) Type
  • For Non-corrosive Gas or Air
  • Calibrated Amplified Analog Signal(Refer to XGZP6849D for I2C interface)
  • Temp. Compensated: 0℃~+60℃(32℉~+140℉)
  • Easy-to-use, Low Cost

Table of Contents

What Is a Vacuum Pressure Sensor?

vacuum pressure sensor

A vacuum pressure sensor is designed to gauge the pressure within a system or surroundings that falls below atmospheric pressure, commonly known as vacuum pressure. It is measured in units of Torr, inches of mercury (Hg), or Pascals (Pa).

Vacuum pressure sensors are typically made from materials that are resistant to vacuum. They are also frequently coated with a substance that prevents dirt or debris from accumulating interfering with the sensor’s function.

How Do Vacuum Pressure Sensors Work?

The vacuum pressure sensor working principle typically uses a diaphragm or other sensitive element that reacts to changes in pressure. As the system’s pressure shifts, the diaphragm undergoes deflection, which is then measured by a sensor element like a piezoelectric crystal or strain gauge. The deflection of the diaphragm leads to alterations in resistance, capacitance, or voltage across the sensor element, proportionate to the pressure change. This resulting signal is subsequently conveyed to an amplifier or signal processing unit, responsible for amplifying and conditioning the signal to ensure compatibility with measurement and analysis performed by other devices or systems.

Vacuum sensors can be either analog or digital. Analog sensors output a continuous voltage signal that is proportional to the amount of vacuum. Digital vacuum sensor output a binary signal that indicates whether the pressure is above or below a certain threshold.

Types of Vacuum Pressure Sensors

The best type of vacuum pressure sensor for a particular application depends on the accuracy, sensitivity, and cost requirements of the application. The most common physical properties used in vacuum pressure sensors are capacitance, resistance, and temperature:

  • Capacitive sensors: Capacitive sensors are designed to assess the alteration in capacitance between two plates as the vacuum pressure fluctuates. The capacitance between two plates is inversely proportional to their distance: when the distance between them grows owing to decreasing vacuum pressure, the capacitance decreases.
  • Piezoresistive sensors: Piezoresistive sensors operate by gauging the variation in resistance exhibited by semiconductor materials in response to alterations in vacuum pressure. A semiconductor material’s resistance is proportional to its number of free electrons. The semiconductor material sees a reduction in the number of free electrons when the vacuum pressure drops, which causes the resistance to increase.
  • Thermocouple sensors: Thermocouple sensors measure alterations in the temperature of a thermocouple with variations in vacuum pressure. A thermocouple is a device that generates an electrical current when two different metals are heated. The magnitude of the current produced is directly proportional to the temperature differential of these two metals. Reduction in vacuum pressure leads to decreased temperatures of the thermocouple, resulting in a decline in the amount of current generated.

Here are the advantages and disadvantages of different types of vacuum pressure sensors:

Capacitive sensors
  • Very accurate
  •  Wide measurement range
  • Sensitive to noise and interference
Piezoresistive sensors
  • More resistant to noise and interference
  • Less expensive than capacitive sensors
  • Not as accurate as capacitive sensors
  • Narrower measurement range
Thermocouple sensors
  • Least expensive
  • Easiest to install
  • Not as accurate as capacitive or piezoresistive sensors

What Is the Purpose of the Vacuum Sensor?

Vacuum sensors are an important part of many systems that require a controlled vacuum environment. Here are some examples of vacuum sensors:

  • Vacuum pumps – Vacuum sensors monitor vacuum pump operation and offer data on the amount of vacuum produced by the pump. This information is useful for resolving pump problems and ensuring proper pump performance.
  • Vacuum chambers –  Vacuum sensors are employed within vacuum chambers to maintain the desired pressure level. By preventing pressure from dropping too low or rising too high, the sensor safeguards objects inside the chamber and prevents damage to the vacuum pump. It can provide feedback to the vacuum pump so that it can maintain the desired pressure level in the chamber.
  • Vacuum gauges – Vacuum sensors are used in vacuum gauges to measure the amount of vacuum in a system. Vacuum gauges find utility in scientific research, manufacturing, and healthcare, among others, aiding in precise pressure measurements and control.

What Are the Advantages of Vacuum Pressure Sensors?

High accuracy

These sensors provide precise and accurate measurements of vacuum pressures, making them well-suited for applications that require meticulous measurements, such as scientific research and manufacturing.

Wide measurement range

Vacuum pressure sensors can effectively measure a broad range of vacuum pressures, from high vacuums to rough vacuums. This versatility allows their usage in various applications across different pressure levels.

Fast response time

Vacuum pressure sensors exhibit quick response times, enabling real-time data acquisition. This rapid feedback facilitates prompt adjustments to vacuum levels within the system, ensuring efficient and effective operations.


Designed to withstand harsh environmental conditions like high temperatures, corrosive gases, and mechanical shock, vacuum pressure sensors are highly reliable and durable, offering consistent performance over extended periods.

Compact size

Many vacuum pressure sensors are compact and space-efficient, making them suitable for applications with limited available space. Their small form factor allows for easy integration into systems without compromising functionality.

Low power consumption

Vacuum pressure sensors typically require low power consumption, making them energy-efficient and cost-effective to operate.


Vacuum pressure sensors are a cost-effective alternative for a variety of applications since they are reasonably inexpensive when compared to other sensing technologies. Their cost-effectiveness doesn’t compromise their performance or reliability.

Applications of Vacuum Pressure Sensors

Vacuum sensors are used in a variety of industrial, scientific, and medical applications where maintaining specific levels of vacuum pressure is critical to the performance and safety of the system. Here are some examples:

  • Industrial settings: Vacuum pressure sensor is used in vacuum chambers for material processing, such as semiconductor fabrication, thin film deposition, and vacuum coating, ensuring that the correct vacuum pressure is maintained during these critical processes.
  • Space simulation: Vacuum pressure sensor is used in space simulation chambers to create and maintain a vacuum environment that mimics the conditions of space, used to test spacecraft components and instruments before launch.
  • Medical applications: Including vacuum-assisted wound closure, negative-pressure tissue therapy, and vacuum pumps for blood collection and processing.
  • Scientific research: Vacuum pressure sensor is used in many scientific experiments involving high-energy particle physics, surface science, and vacuum technology development, creating and maintaining the required vacuum environment in these experiments.
  • HVAC systems: Systems for heating, ventilation, and air conditioning (HVAC) depend heavily on vacuum pressure sensor. They are utilized to monitor and regulate vacuum levels, facilitating enhanced energy efficiency and lowered maintenance expenses.
  • Aerospace industry: Vacuum pressure sensor is used in aerospace applications, such as in aircraft fuel systems and environmental control systems, these sensors ensure the accurate maintenance of the required vacuum pressure.

FAQs About Vacuum Pressure Sensor

What Are Vacuum Sensors and Vacuum Transducer Sensors?

When measuring pressure in a vacuum setting, vacuum sensors typically use a diaphragm or another sensitive component that reacts to pressure changes.

In comparison, vacuum transducer sensors transform vacuum pressure signals into electrical output signals that industrial automation systems can interpret. These pressure sensors comprise two primary elements: a sensing element and a transduction element. The sensing element uses the same principles as a vacuum sensor to measure vacuum pressure, while the transduction element converts the pressure measurement into an electrical signal like voltage or current.

Why Is Calibration Important for Vacuum Pressure Sensors?

Vacuum pressure sensors need to be calibrated in order to produce accurate and reliable measurements of vacuum pressures. Over time, vacuum pressure sensors can drift out of calibration due to a number of factors, including:

  • Environmental factors – Such as temperature and humidity.
  • Usage – Such as the number of times they are used and the amount of vacuum they are exposed to.
  • Manufacturing defects – Vacuum pressure sensors can also be affected by manufacturing defects.

Vacuum pressure sensor calibration involves comparing the readings of a sensor to a known reference standard to determine any deviations from the expected values and making adjustments to correct the sensor’s output.

What Is the Perfect Vacuum Pressure?

Perfect vacuum pressure is a theoretical concept, there is no such thing as “perfect” vacuum pressure. It is defined as an environment with zero pressure, containing no matter or particles.

It is impossible to create a perfect vacuum in practice. The best that can be achieved is a high vacuum, which is a vacuum with very low pressure.

What Is the Difference Between Gauge Pressure and Vacuum Pressure?

what is the difference between gauge pressure and vacuum pressure

The main difference between gauge pressure and vacuum pressure is the reference point used to measure the pressure.

Gauge pressure is measured relative to atmospheric pressure, which is defined as 1 bar or 14.7 psi at sea level. It is measured in pounds per square inch (PSI), Gauge pressure can be either positive or negative, with positive indicating a pressure higher than atmospheric pressure, and negative indicating a pressure lower than atmospheric pressure. For example, the pressure inside a car tire relative to atmospheric pressure is an example of positive gauge pressure.

On the other hand, vacuum pressure is measured relative to absolute zero pressure. It is measured in inches of mercury (Hg) or Torr. Vacuum pressure can only be negative because any measured pressure will always be less than absolute zero pressure. For example, the pressure inside a vacuum chamber used for scientific experiments is an example of a negative vacuum pressure.

Here is a table that summarizes the differences between gauge pressure and vacuum pressure:

 DefinitionUnitsTypical applications
Gauge PressurePressure relative to atmospheric pressurePSI


Hydraulic systems


Vacuum PressurePressure below atmospheric pressureHg or Torr

Vacuum chambers

Vacuum pumps

Vacuum cleaners

What Is the Purpose of Vacuum In HVAC?

  • Removing air and moisture from the system – This is important to prevent the growth of mold and bacteria and ensure health problems.
  • Evacuating the system before charging it with refrigerant – This ensures that there is no air or moisture in the system and prevents the refrigerant from not working properly.
  • Testing the system for leaks – A vacuum can be used to create a negative pressure in the system, which will cause any leaks to be visible.
  • Removing contaminants from the system – Can be used to clean out the system of impurities like dirt, dust, and debris, which boosts performance and effectiveness.

CFSensor is a leading provider of vacuum pressure sensor. If you are looking for a reliable and accurate vacuum sensor, CFSensor is the best choice for you. Contact us today to find out more about our products and services.